Rachel J Cannara et al 2008 Nanotechnology 19 395305 doi:10.1088/0957-4484/19/39/395305
Rachel J Cannara, Bernd Gotsmann, Armin Knoll and Urs Dürig
Show affiliationsFuture applications for parallel probes, including probe-based data storage and probe lithography, demand that probe technologies achieve patterning rates in the megahertz per probe range at feature sizes below 30 nm, i.e. ~1 Tbit in−2. If thermo-mechanical indentation of polymers is employed, some uncertainty remains as to whether the physics governing the indentation kinetics at these short timescales permits the fast indentation processes required. We demonstrate the feasibility of using polymer media for thermo-mechanical probe storage or lithography, at sliding speeds of 15 mm s−1 and sub-microsecond indentation times, which fall into this previously untapped regime.
81.40.Np Fatigue, corrosion fatigue, embrittlement, cracking, fracture, and failure
81.16.Rf Nanoscale pattern formation
61.41.+e Polymers, elastomers, and plastics
Soft matter, liquids and polymers
Issue 39 (1 October 2008)
Received 16 May 2008, in final form 15 July 2008
Published 18 August 2008
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