Jochen Weber et al 2008 Nanotechnology 19 375301 doi:10.1088/0957-4484/19/37/375301
Jochen Weber, Jürgen Weis, Maik Hauser and Klaus v Klitzing
Show affiliationsA technique for the fabrication of single-electron transistors (SETs) on tips for use in scanning probe microscopy is presented. The tips are micromachined out of an MBE-grown AlGaAs–GaAs heterostructure with a trench within each tip. The SETs are produced by aluminum evaporation and oxidation, and natural shadowing by the trench is used to separate the source and drain electrodes. By separating adjacent tips also by trenches, the concept allows the fabrication of tip arrays for parallel probing.
73.23.Hk Coulomb blockade; single-electron tunneling
73.40.Kp III-V semiconductor-to-semiconductor contacts, p-n junctions, and heterojunctions
85.35.Gv Single electron devices
68.37.Hk Scanning electron microscopy (SEM) (including EBIC)
Issue 37 (17 September 2008)
Received 5 May 2008, in final form 10 June 2008
Published 1 August 2008
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