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Aligned nanowire growth using lithography-assisted bonding of a polycarbonate template for neural probe electrodes

Hargsoon Yoon1, Devesh C Deshpande1, Vasuda Ramachandran1,2 and Vijay K Varadan1,2,3

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This research presents a fabrication method of vertically aligned nanowires on substrates using lithography-assisted template bonding (LATB) towards developing highly efficient electrodes for biomedical applications at low cost. A polycarbonate template containing cylindrical nanopores is attached to a substrate and the nanopores are selectively opened with a modified lithography process. Vertically aligned nanowires are grown by electrochemical deposition through these open pores on polyimide film and silicon substrates. The process of opening the nanopores is optimized to yield uniform growth of nanowires. The morphological, crystalline, and electrochemical properties of the resulting vertically aligned nanowires are discussed using scanning electron microscopy (SEM), x-ray diffraction (XRD), and electrochemical analysis tools. The potential application of this simple and inexpensive fabrication technology is discussed in the development of neural probe electrodes.


PACS

81.16.Nd Nanolithography

81.07.-b Nanoscale materials and structures: fabrication and characterization

82.45.Yz Nanostructured materials in electrochemistry

87.85.Qr Nanotechnologies-design

82.45.Rr Electroanalytical chemistry

82.80.Fk Electrochemical methods

Subjects

Nanoscale science and low-D systems

Chemical physics and physical chemistry

Dates

Issue 2 (16 January 2008)

Received 6 September 2007, in final form 24 October 2007

Published 6 December 2007



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