En-Te Hwu et al 2008 Nanotechnology 19 115501 doi:10.1088/0957-4484/19/11/115501
En-Te Hwu1, Shao-Kang Hung1, Chih-Wen Yang1, Kuang-Yuh Huang2 and Ing-Shouh Hwang1
Show affiliationsHere we demonstrate that an astigmatic detection system (ADS), constructed with a modified digital-versatile-disk (DVD) optical head, can achieve real-time measurement of a linear displacement and two-dimensional (2D) tilt angles with a high sensitivity. An atomic force microscope (AFM), using our detection system to sense the deflection of microfabricated cantilevers, can resolve single atomic steps on graphite surfaces with a noise level less than 0.04 nm in topographic images. This astigmatic detection system can even detect mechanical resonances due to thermal vibrations of microfabricated cantilevers. The high sensitivity, small detecting size and high bandwidth of this detection system is suitable for dynamic characterization of elements in micromachined components. Further optimization of the system will promise many other applications in diverse technological fields.
42.79.Vb Optical storage systems, optical disks
07.10.Cm Micromechanical devices and systems
07.07.Df Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
Issue 11 (19 March 2008)
Received 5 December 2007
Published 18 February 2008
En-Te Hwu et al 2008 Nanotechnology 19 115501
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