Jae Young Park et al 2008 Nanotechnology 19 105503 doi:10.1088/0957-4484/19/10/105503
Jae Young Park, Dong Eon Song and Sang Sub Kim1
Show affiliationsVertically and laterally aligned ZnO nanorod arrays were synthesized on Pt-coated Si substrates by catalyst-free metal organic chemical vapor deposition. An approach to fabricating chemical sensors based on the nanorod arrays using a coating-and-etching process with a photo-resist is reported. Tests of the devices as oxygen gas sensors have been performed. Our results demonstrate that the approach holds promise for the realization of sensitive and reliable nanorod array chemical sensors.
07.07.Df Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
85.35.-p Nanoelectronic devices
81.65.Cf Surface cleaning, etching, patterning
82.80.-d Chemical analysis and related physical methods of analysis
Instrumentation and measurement
Surfaces, interfaces and thin films
Issue 10 (12 March 2008)
Received 23 October 2007, in final form 20 December 2007
Published 13 February 2008
Jae Young Park et al 2008 Nanotechnology 19 105503
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