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Characterization and air pressure sensing of doubly clamped multi-walled carbon nanotubes

Jin-Won Song, Jong-Hong Lee, Hee Won Seo and Chang-Soo Han1

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We report the fabrication and characterization of doubly clamped multi-walled carbon nanotubes (MWNTs). The devices were assembled by applying an electric field while the MWNTs were firmly clamped and suspended at both ends of a thick metal trench electrode in solution. The contacts were further processed using a focused ion beam. Final dimensions ranged from 100 to 150 nm in diameter and 1.5–4 µm in length. The fabricated devices were characterized by IV curves, impedance measurements, and their mechanical deformation under a high pressure airflow. In the latter case, the resistance of a MWNT device varied linearly with the magnitude of the air pressure. These characteristics strongly suggest potential applications in fields such as nanoelectronics and sensors.


PACS

85.35.Kt Nanotube devices

81.07.De Nanotubes

Subjects

Electronics and devices

Nanoscale science and low-D systems

Dates

Issue 1 (9 January 2008)

Received 13 March 2007, in final form 18 July 2007

Published 29 November 2007



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