Daan Wouters and Ulrich S Schubert 2007 Nanotechnology 18 485306 doi:10.1088/0957-4484/18/48/485306
Daan Wouters1 and Ulrich S Schubert1,2
Show affiliationsA broad variety of functional structures with nanometer dimensions can be produced by combining the local probe oxidation of octadecyl trichlorosilane (OTS) self-assembled monolayers on silicon and suitable chemical modification and self-assembly methods. However, local probe-based patterning methods are inherently slow and, due to the small areas that are addressed, spectroscopic characterization is difficult. Here we report on the possibility of creating large-scale surface patterns by electro-oxidation using both an automated oxidation setup and conductive parallel cantilever arrays. This enables large-scale surface pattering while retaining the high resolution and freedom of (sequential) pattern formation, which would be lost if macroscopic patterned stamps were applied as electrodes.
81.16.Rf Nanoscale pattern formation
81.07.-b Nanoscale materials and structures: fabrication and characterization
Issue 48 (5 December 2007)
Received 23 July 2007, in final form 14 September 2007
Published 1 November 2007
Daan Wouters and Ulrich S Schubert 2007 Nanotechnology 18 485306
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