Wuxia Li and P A Warburton 2007 Nanotechnology 18 485305 doi:10.1088/0957-4484/18/48/485305
Low-current focused-ion-beam induced deposition of three-dimensional tungsten nanoscale conductors
Wuxia Li and P A Warburton
Show affiliationsWe have used focused-ion-beam assisted chemical vapour deposition to grow 'flying' tungsten nanorods—i.e. nanoscale wiring which is not lying on the substrate surface. Flying rods of cross-sectional diameter of the order 100 nm were grown with a 1 pA gallium ion-beam current. The electrical resistivity of such flying nanorods is comparable to that of nanowires grown on the substrate surface. Such flying nanorods could be used to make electrical contact to single vertical nanocrystals.
- PACS
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81.15.Jj Ion and electron beam-assisted deposition; ion plating
73.63.Bd Nanocrystalline materials
81.07.-b Nanoscale materials and structures: fabrication and characterization
- Subjects
- Dates
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Issue 48 (5 December 2007)
Received 21 March 2007, in final form 2 May 2007
Published 30 October 2007
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Low-current focused-ion-beam induced deposition of three-dimensional tungsten nanoscale conductors
Wuxia Li and P A Warburton 2007 Nanotechnology 18 485305
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