O Sardan et al 2007 Nanotechnology 18 375501 doi:10.1088/0957-4484/18/37/375501
O Sardan1,4, B Erdem Alaca1,5, A D Yalcinkaya1,6, P Bøggild2, P T Tang3 and O Hansen2
Show affiliationsA batch-compatible integration of micro-electro-mechanical systems (MEMS) with nanoscale objects is demonstrated using the example of a gripping device with nanoscale end-effectors. The proposed nanofabrication technique is based on creating a certain number of nanowires/ribbons on a planar surface, each with a known orientation, using self-assembled crack networks as a template. Since both the location and orientation of the nanowires/ribbons are known, the gripping device can be lithographically transferred on to the substrate ensuring full integration of MEMS with nanoscale end-effectors. Two nanowires/ribbons are attached to each MEMS solely at desired locations with a desired inclination in contrast to most other self-assembly-based techniques of growing nanoscale objects. Challenges unique to MEMS fabrication are encountered raising process requirements beyond those of the simple electrode–nanowire integration. With issues related to yield and end-effector geometry remaining to be studied further, the method proposes a true batch fabrication for nanoscale objects and their integration with MEMS, which does not require the use of nano-lithographic techniques.
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
Issue 37 (19 September 2007)
Received 21 May 2007, in final form 9 July 2007
Published 22 August 2007
O Sardan et al 2007 Nanotechnology 18 375501
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