Y C Chang et al 2007 Nanotechnology 18 285303 doi:10.1088/0957-4484/18/28/285303
Y C Chang1,2, G H Mei1, T W Chang1, T J Wang2, D Z Lin1 and C K Lee1,3
Show affiliationsHerein, we propose a special type of periodic subwavelength structure, which is optically an effective gradient-index (GRIN) antireflective surface that also exhibits enhanced-hydrophobic behaviour. Our new concept was developed adopting both the effective medium theory (EMT) and Wenzel's wettability model. To demonstrate the concept, an inverted pyramid structure was fabricated by electron beam (EB) lithography and anisotropic etching. The experimental data was found to be in good agreement with the theoretical prediction. Some potential applications that can benefit from this combination of antireflection and enhanced-hydrophobicity features are discussed.
42.82.Cr Fabrication techniques; lithography, pattern transfer
81.65.Cf Surface cleaning, etching, patterning
68.35.B- Structure of clean surfaces (and surface reconstruction)
Soft matter, liquids and polymers
Surfaces, interfaces and thin films
Issue 28 (18 July 2007)
Received 30 March 2007, in final form 21 May 2007
Published 15 June 2007
Y C Chang et al 2007 Nanotechnology 18 285303
R Pordes et al 2008 J. Phys.: Conf. Ser. 119 052028
S Samarin et al 2008 J. Phys.: Conf. Ser. 100 072033
Nicola M Pugno 2007 J. Phys.: Condens. Matter 19 395001
P Bolognesi et al 2008 J. Phys. B: At. Mol. Opt. Phys. 41 065203
M E Msall et al 2007 J. Phys.: Conf. Ser. 92 012026
J F Williams et al 2007 J. Phys.: Conf. Ser. 80 012023
Pranawa C Deshmukh et al 2007 J. Phys.: Conf. Ser. 80 011001
J F Williams et al 2007 J. Phys.: Conf. Ser. 80 012024
James Muzerolle et al 2009 ApJ 704 L15