Dominik Ziegler et al 2007 Nanotechnology 18 225505 doi:10.1088/0957-4484/18/22/225505
Dominik Ziegler1, Jörg Rychen2, Nicola Naujoks1 and Andreas Stemmer1
Show affiliationsWe describe a novel method of single-scan Kelvin probe force microscopy, operating simultaneously with amplitude-modulation distance control in ambient air. A separate Kelvin probe feedback control loop compensates for potential differences between tip and sample by minimizing electrostatic forces. As a result, electrostatically induced height errors in topography are automatically cancelled. To prevent crosstalk from topography or errors in distance control, the Kelvin probe feedback employs phase information resulting from a combination of mechanical and electrical excitation of the cantilever at its second flexural eigenmode. The feedback for amplitude-modulation distance control operates as usual close to the first eigenfrequency.
Issue 22 (6 June 2007)
Received 26 March 2007
Published 8 May 2007
Dominik Ziegler et al 2007 Nanotechnology 18 225505
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