Danilo Zschech et al 2006 Nanotechnology 17 2122 doi:10.1088/0957-4484/17/9/008
Danilo Zschech1,6, Dong Ha Kim2,3, Alexey P Milenin1, Sigrid Hopfe1, Roland Scholz1, Petra Göring1, Reinald Hillebrand1, Stephan Senz1, Craig J Hawker4, Thomas P Russell5, Martin Steinhart1 and Ulrich Gösele1
Show affiliationsOrdered gold nanoparticle arrays with high lateral density of 6.87 × 1010 nanoparticles cm−2, which are stable up to temperatures of 600 °C, were fabricated. To this end, nanoparticles formed by thermal vacuum evaporation of Au were immobilized within the pores of nanoporous silicon wafers prepared by block copolymer lithography coupled with dry plasma etching. Even after high-temperature treatment the degree of order imposed by the block copolymer template was retained. Optionally, a nanoporous silicon nitride mask can cover the nanoporous silicon.
81.07.-b Nanoscale materials and structures: fabrication and characterization
68.37.Hk Scanning electron microscopy (SEM) (including EBIC)
Issue 9 (14 May 2006)
Received 12 September 2005, in final form 23 November 2005
Published 28 March 2006
Danilo Zschech et al 2006 Nanotechnology 17 2122
M J Benacquista et al 2007 Class. Quantum Grav. 24 S513
Patricia Purdue and Shane L Larson 2007 Class. Quantum Grav. 24 5869
M O Steinitz and J Genossar 1981 J. Phys. C: Solid State Phys. 14 L939
B MacDonald et al 1985 J. Phys. A: Math. Gen. 18 2627
F dell’Isola et al 2004 Smart Mater. Struct. 13 299
M O Steinitz and W Schnepf 1983 J. Phys. E: Sci. Instrum. 16 611
D A Pink and M O Steinitz 1988 J. Phys. F: Met. Phys. 18 789
D A Tindall and M O Steinitz 1983 J. Phys. F: Met. Phys. 13 L71
M O Steinitz and D A Pink 1980 J. Phys. F: Met. Phys. 10 L247