J A J Steen et al 2006 Nanotechnology 17 1464 doi:10.1088/0957-4484/17/5/050
J A J Steen1, J Hayakawa2, T Harada2, K Lee3, F Calame4, G Boero1, A J Kulik3 and J Brugger1
Show affiliationsWe have developed a new hybrid AFM probe combining an SU-8 polymer body with a full tungsten cantilever having a nanometric tip. The fabrication is based on surface micromachining a silicon wafer, where tungsten is sputter deposited in oxidation sharpened moulds to yield sharp tips with radius below 20 nm. The material properties of tungsten were measured, yielding a hardness of 14 GPa, a specific resistivity of 14.8 µΩ cm and Young's modulus of 380 GPa. Analyses of the probes show a mechanical quality factor of 90 in air, and a low contact resistance of 25 Ω on a gold sample is measured. AFM imaging is demonstrated. As a step in the development of a robust electrically conducting AFM probe, the results are very promising.
Issue 5 (14 March 2006)
Received 30 November 2005, in final form 18 January 2006
Published 16 February 2006
J A J Steen et al 2006 Nanotechnology 17 1464
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