Matthew R Maschmann et al 2006 Nanotechnology 17 3925 doi:10.1088/0957-4484/17/15/052
Matthew R Maschmann1,2, Aaron D Franklin1,3, Placidus B Amama1, Dmitri N Zakharov1, Eric A Stach1,4, Timothy D Sands1,3,4 and Timothy S Fisher1,2,5
Show affiliationsVertical single-walled and double-walled carbon nanotube (SWNT and DWNT) arrays have been grown using a catalyst embedded within the pore walls of a porous anodic alumina (PAA) template. The initial film structure consisted of a SiOx adhesion layer, a Ti layer, a bottom Al layer, a Fe layer, and a top Al layer deposited on a Si wafer. The Al and Fe layers were subsequently anodized to create a vertically oriented pore structure through the film stack. CNTs were synthesized from the catalyst layer by plasma-enhanced chemical vapour deposition (PECVD). The resulting structure is expected to form the basis for development of vertically oriented CNT-based electronics and sensors.
68.37.Hk Scanning electron microscopy (SEM) (including EBIC)
81.15.Gh Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, etc.)
Issue 15 (14 August 2006)
Received 24 April 2006, in final form 20 June 2006
Published 11 July 2006
Matthew R Maschmann et al 2006 Nanotechnology 17 3925
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