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Silicon nanowires as enhancement-mode Schottky barrier field-effect transistors

Sang-Mo Koo, Monica D Edelstein, Qiliang Li, Curt A Richter and Eric M Vogel

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Silicon nanowire field-effect transistors (SiNWFETs) have been fabricated with a highly simplified integration scheme to function as Schottky barrier transistors with excellent enhancement-mode characteristics and a high on/off current ratio ~107. SiNWFETs show significant improvement in the thermal emission leakage (~6 × 10−13 A µm−1) compared to reference FETs with a larger channel width (~7 × 10−10 A µm−1). The drain current level depends substantially on the contact metal work function as determined by examining devices with different source/drain contacts of Ti (≈4.33 eV) and Cr (≈4.50 eV). The different conduction mechanisms for accumulation- and inversion-mode operation are discussed and compared with two-dimensional numerical simulation results.


PACS

85.35.-p Nanoelectronic devices

73.30.+y Surface double layers, Schottky barriers, and work functions

85.30.Hi Surface barrier, boundary, and point contact devices

85.30.Tv Field effect devices

Subjects

Electronics and devices

Semiconductors

Surfaces, interfaces and thin films

Nanoscale science and low-D systems

Dates

Issue 9 (September 2005)

Received 22 April 2005

Published 29 June 2005



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