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Sub-10 nanometre fabrication: molecular templating, electron-beam sculpting and crystallization of metallic nanowires

M Remeika and A Bezryadin

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Homogeneous metallic nanowires with diameters below 10 nm are produced by sputter coating suspended DNA molecules and/or carbon nanotubes. A fabrication method is described that allows 'e-beam nanosculpting', i.e. local modification of the shape of nanowires, with a resolution of ~3 nm. The process is performed with a focused electron beam (e-beam) in a transmission electron microscope, under direct visual control. We also demonstrate that e-beam radiation can induce local crystallization of nanowires. This method could be used to fabricate novel electronic devices, e.g. single-electron tunnelling transistors, with dimensions below 10 nm, possibly operating at room temperature.


PACS

81.07.-b Nanoscale materials and structures: fabrication and characterization

68.65.-k Low-dimensional, mesoscopic, and nanoscale systems: structure and nonelectronic properties

64.70.D- Solid–liquid transitions

61.80.Fe Electron and positron radiation effects

81.16.-c Methods of nanofabrication and processing

61.82.Bg Metals and alloys

Subjects

Surfaces, interfaces and thin films

Condensed matter: structural, mechanical & thermal

Nanoscale science and low-D systems

Dates

Issue 8 (August 2005)

Received 5 March 2005, in final form 20 April 2005

Published 17 May 2005



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