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Thin film resists for registration of single-ion impacts

V Millar, C I Pakes, S Prawer, B Rout and D N Jamieson

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We demonstrate registration of the location of the impact site of single ions using a thin film polymethyl methacrylate resist on a SiO2/Si substrate. Carbon nanotube-based atomic force microscopy is used to reveal craters in the surface of chemically developed films, consistent with the development of latent damage induced by single-ion impacts. The responses of thin PMMA films to the implantation of He+ and Ga+ ions indicate the role of electronic and nuclear energy loss mechanisms at the single-ion level.


PACS

84.32.Ff Conductors, resistors (including thermistors, varistors, and photoresistors)

68.37.Ps Atomic force microscopy (AFM)

61.80.-x Physical radiation effects, radiation damage

68.55.Ln Defects and impurities: doping, implantation, distribution, concentration, etc.

Subjects

Electronics and devices

Surfaces, interfaces and thin films

Condensed matter: structural, mechanical & thermal

Dates

Issue 6 (June 2005)

Received 4 January 2005, in final form 9 March 2005

Published 11 April 2005



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