M Kopycinska-Müller et al 2005 Nanotechnology 16 703 doi:10.1088/0957-4484/16/6/013
M Kopycinska-Müller1, R H Geiss, J Müller and D C Hurley
Show affiliationsAtomic force acoustic microscopy (AFAM), an emerging technique that affords nanoscale lateral and depth resolution, was employed to measure the elastic properties of ultrathin films. We measured the indentation modulus M of three nickel films approximately 50, 200, and 800 nm thick. In contrast to conventional methods such as nanoindentation, the AFAM results remained free of any influence of the silicon substrate, even for the 50 nm film. X-ray diffraction and scanning electron microscopy results indicated that the films were nanocrystalline with a strong preferred (111) orientation. Values of M ranged from 210 to 223 GPa, lower than expected from values for bulk nickel. The reduced values of the elastic modulus may be attributed to grain-size effects in the nanocrystalline films.
68.60.Bs Mechanical and acoustical properties
81.07.Bc Nanocrystalline materials
81.40.Jj Elasticity and anelasticity, stress-strain relations
81.40.Np Fatigue, corrosion fatigue, embrittlement, cracking, fracture, and failure
68.37.Ps Atomic force microscopy (AFM)
68.55.-a Thin film structure and morphology
68.37.Hk Scanning electron microscopy (SEM) (including EBIC)
Surfaces, interfaces and thin films
Issue 6 (June 2005)
Received 23 November 2004, in final form 18 February 2005
Published 5 April 2005
M Kopycinska-Müller et al 2005 Nanotechnology 16 703
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