A Wu et al 2005 Nanotechnology 16 2587 doi:10.1088/0957-4484/16/11/020
A Wu1, P M Vilarinho1, V V Shvartsman1, G Suchaneck2 and A L Kholkin1
Show affiliationsPb (ZrxTi1−x)O3 (PZT) thin films with (111) texture were deposited onto commercially available Pt/Ti/SiO2/Si substrates via the sol–gel technique. Piezoforce microscopy (PFM) was then used to analyse the evolution of domain populations as a function of the Zr content x. Domain structures of virgin films, local piezoelectric properties of individual grains and piezoelectric histograms were studied in films with different compositions (x = 0.2–0.6), which cover both the tetragonal and rhombohedral sides of the phase diagram. In films with low Zr content mainly single-domain grains were observed. As the Zr content increased, a larger fraction of polydomain grains was found. The local piezoelectric response measured inside sufficiently big grains indicated that the strongest piezoelectric effect occurs in PZT30/70 (x = 0.3) films. This was attributed to two different effects: high out-of-plane polarization achieved due to the (111) texture and influence of the dielectric constant. In tetragonal films with their lower dielectric constants the electric field seen by a ferroelectric is higher as compared to other compositions, giving rise to an apparent increase of the effective piezoelectric response measured by PFM. The analysis of the domain images indicated that sol–gel derived PZT films are slightly self-polarized near the free surface. With increasing Zr/Ti ratio, the variation of domain populations resulted in reversing the sign of the average piezoelectric response at x≈0.3. It is demonstrated that PFM histograms are extremely sensitive to PZT composition and can be used as a signature of complex domain structures in ferroelectric thin films.
77.55.+f Dielectric thin films
81.20.Fw Sol-gel processing, precipitation
68.55.Nq Composition and phase identification
77.22.Ej Polarization and depolarization
77.65.-j Piezoelectricity and electromechanical effects
77.22.Ch Permittivity (dielectric function)
77.84.Dy Niobates, titanates, tantalates, PZT ceramics, etc.
Condensed matter: electrical, magnetic and optical
Issue 11 (November 2005)
Received 12 June 2005, in final form 8 August 2005
Published 19 September 2005
A Wu et al 2005 Nanotechnology 16 2587
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