Johannes H Kindt et al 2004 Nanotechnology 15 1131 doi:10.1088/0957-4484/15/9/005
Johannes H Kindt1, Georg E Fantner1, James B Thompson2 and Paul K Hansma1
Show affiliationsWe present an automation technique for the growth of electron beam deposited tips on whole wafers of atomic force microscope cantilevers. This technique uses pattern recognition on scanning electron microscope images of successive magnifications to precisely place the tips on the cantilevers. We demonstrate the capabilities of the working system on a four-inch wafer of microfabricated small cantilevers with a total of approximately 2100 levers per week.
81.15.Jj Ion and electron beam-assisted deposition; ion plating
Issue 9 (September 2004)
Received 18 March 2004
Published 1 July 2004
Johannes H Kindt et al 2004 Nanotechnology 15 1131
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