Quick search Find article
Quick search
Find article

Automated wafer-scale fabrication of electron beam deposited tips for atomic force microscopes using pattern recognition

Johannes H Kindt1, Georg E Fantner1, James B Thompson2 and Paul K Hansma1

Show affiliations


We present an automation technique for the growth of electron beam deposited tips on whole wafers of atomic force microscope cantilevers. This technique uses pattern recognition on scanning electron microscope images of successive magnifications to precisely place the tips on the cantilevers. We demonstrate the capabilities of the working system on a four-inch wafer of microfabricated small cantilevers with a total of approximately 2100 levers per week.


PACS

81.15.Jj Ion and electron beam-assisted deposition; ion plating

68.37.Ps Atomic force microscopy (AFM)

42.30.Sy Pattern recognition

Subjects

Surfaces, interfaces and thin films

Optics, quantum optics and lasers

Dates

Issue 9 (September 2004)

Received 18 March 2004

Published 1 July 2004



  1. Automated wafer-scale fabrication of electron beam deposited tips for atomic force microscopes using pattern recognition

    Johannes H Kindt et al 2004 Nanotechnology 15 1131

  2. A mass spectrometric study of positive and negative ion formation in an SF6 corona. II. Influence of water and SF6 neutral by-products

    I Sauers and G Harman 1992 J. Phys. D: Appl. Phys. 25 774

  3. Modelling of electron and hole trapping in oxides

    A L Shluger et al 2009 Modelling Simul. Mater. Sci. Eng. 17 084004

  4. Steering of the French time scale TA(F) towards the LNE-SYRTE primary frequency standards

    Pierre Uhrich et al 2008 Metrologia 45 S42

  5. Protection of the CERN Large Hadron Collider

    R Schmidt et al 2006 New J. Phys. 8 290

  6. A new method for inductance calculations

    M A Bueno and A K T Assis 1995 J. Phys. D: Appl. Phys. 28 1802

  7. Constant pressure-differential gas apparatus for kinetic studies of gas-solid reactions

    J C Measor 1962 J. Sci. Instrum. 39 46

  8. Anisotropic fast neutral particle spectra in the MAST spherical tokamak

    M R Tournianski et al 2005 Plasma Phys. Control. Fusion 47 671

  9. Kondo-effect of substitutional cobalt impurities at copper surfaces

    P Wahl et al 2009 New J. Phys. 11 113015

  10. High energy neutrino astronomy: the experimental road

    Christian Spiering 2003 J. Phys. G: Nucl. Part. Phys. 29 843

Users also read

What's this?
This innovative new feature generates a list of articles 'also read' by other users based on them reading the original article. Article abstracts citations and references are all considered and weighted accordingly. We hope that this will help you find relevant papers for your research.

  1. Finite optical spot size and position corrections in thermal spring constant calibration
  2. Indirect identification and compensation of lateral scanner resonances in atomic force microscopes
  3. Dynamic behaviour of dagger-shaped cantilevers for atomic force microscopy

View by subject




Export








Please login to access our web services, or create an account if you don't yet have one.

You must have cookies enabled in your web browser to be able to login.

Username
Password

Forgotten your password? Get a new one here.