M Saif Islam et al 2004 Nanotechnology 15 L5 doi:10.1088/0957-4484/15/5/L01
M Saif Islam, S Sharma, T I Kamins and R Stanley Williams
Show affiliationsWe report simultaneous lateral growth of a high density of highly oriented, metal-catalyzed silicon nanowires on a patterned silicon substrate and bridging of nanowires between two vertical silicon sidewalls, which can be developed into electrodes of an electronic device. After angled deposition of catalytic metal nanoparticles on one of two opposing vertical silicon surfaces, we used a metal-catalyzed chemical vapour deposition process to grow nanowires and eventually form mechanically robust 'nanobridges'. The growth and bridging of these nanowire arrays can be integrated with existing silicon processes. This method of connecting multiple nanowires between two electrodes offers the high surface-to-volume ratio needed for nanosensor applications.
81.16.Be Chemical synthesis methods
81.07.-b Nanoscale materials and structures: fabrication and characterization
Issue 5 (May 2004)
Received 15 September 2003
Published 23 January 2004
M Saif Islam et al 2004 Nanotechnology 15 L5
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