F Prieto et al 2003 Nanotechnology 14 907 doi:10.1088/0957-4484/14/8/312
F Prieto1, B Sepúlveda1, A Calle1, A Llobera2, C Domínguez2, A Abad3, A Montoya3 and L M Lechuga1
Show affiliationsIntegrated optical sensors have become important in recent years since they are the only technology which allows the direct detection of biomolecular interactions. Moreover, silicon microelectronics technology allows mass production as well as the fabrication of nano-/macrosystems on the same platform by hybrid integration of sources, sensors, photodetectors and complementary metal-oxide semiconductor electronics.
For the fabrication of an optical sensor nanodevice with an integrated Mach–Zehnder interferometric (MZI) configuration, the optical waveguides must have two main features: monomode behaviour and a high surface sensitivity. In this paper we present the development of a MZI sensor based on total internal reflection waveguides with nanometre dimensions. The aim is to use these sensors in environmental control to detect water pollutants by immunoassay techniques.
87.85.Qr Nanotechnologies-design
87.15.K- Molecular interactions; membrane-protein interactions
87.80.-y Biophysical techniques (research methods)
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
07.07.Df Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
Issue 8 (August 2003)
Received 7 October 2002, in final form 27 May 2003
Published 2 July 2003
F Prieto et al 2003 Nanotechnology 14 907
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