Do-Hyung Kim et al 2003 Nanotechnology 14 1269 doi:10.1088/0957-4484/14/12/007
The growth of freestanding single carbon nanotube arrays
Do-Hyung Kim1, Dong-Soo Cho1, Hoon-Sik Jang1, Chang-Duk Kim2 and Hyeong-Rag Lee1
Show affiliationsRegular arrays of freestanding single carbon nanotubes (CNTs) were prepared on Ni dot arrays by dc plasma-enhanced chemical vapour deposition. The size of the Ni dot was reduced for single CNT growth by means of conventional photolithography and a lateral wet-etch process. The vertical alignment of a single CNT was directly dependent on the location of the catalyst metals. Using this method, well-separated and well-defined regular arrays of freestanding CNTs can be fabricated and the process can be scaled up at a lower cost than electron beam lithography, which is encouraging for applications in field emitters and nanoelectrodes.
- PACS
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81.15.Gh Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, etc.)
- Subjects
- Dates
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Issue 12 (December 2003)
Received 5 August 2003, in final form 29 September 2003
Published 22 October 2003
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The growth of freestanding single carbon nanotube arrays
Do-Hyung Kim et al 2003 Nanotechnology 14 1269
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