G Schitter and A Stemmer 2002 Nanotechnology 13 663 doi:10.1088/0957-4484/13/5/324
G Schitter and A Stemmer1
Show affiliationsThis paper presents a method for cancelling mechanical vibrations in scanning probe microscopes by recording the vibrations with an auxiliary distance sensor and subsequently removing them from the topography signal. For the experimental verification, the auxiliary sensor was mounted in a commercial atomic force microscope (AFM) side by side with the probe tip. Combination of the signals from the AFM and distance sensor converts the microscope into a differential instrument, allowing for subtraction of the vibration-induced noise up to the control bandwidth of the AFM system. Imaging with sub-nanometre resolution in a noisy environment was demonstrated.
46.40.-f Vibrations and mechanical waves
Issue 5 (October 2002)
Received 29 August 2002
Published 20 September 2002
G Schitter and A Stemmer 2002 Nanotechnology 13 663
Christian Korff 2005 J. Phys. A: Math. Gen. 38 47
G. Becker 1994 Nucl. Fusion 34 507
V I Fisher et al 2006 Phys. Scr. 74 614
Nien Fan Zhang 2006 Metrologia 43 S276
Zdeněk Bochníček 2008 Phys. Educ. 43 51
Inseok Yang and Yong-Gyoo Kim 2007 Metrologia 44 L10
S S Kubakaddi et al 1991 J. Phys.: Condens. Matter 3 5445
Yi Wei et al 2009 J. Phys. A: Math. Theor. 42 462002
Elsa Batista and Richard Paton 2008 Metrologia 45 127