D-X Ye et al 2002 Nanotechnology 13 615 doi:10.1088/0957-4484/13/5/314
D-X Ye, Y-P Zhao, G-R Yang, Y-G Zhao, G-C Wang and T-M Lu
Show affiliationsNanometre-size cobalt columns with tilt angle ranging from ~0º to ~40º and fixed density on Si(100) were fabricated by combining oblique-angle physical evaporation with controlled substrate motion. The column tilt angle can be controlled by the speed and phase of substrate rotation in addition to the angle of the incident vapour beam. A simple geometrical model is proposed to describe the relationship between the tilt angle of the cobalt columns and the rotational parameters (speed and phase), and is consistent with our experimental results.
81.07.-b Nanoscale materials and structures: fabrication and characterization
Issue 5 (October 2002)
Received 2 July 2002, in final form 6 August 2002
Published 6 September 2002
D-X Ye et al 2002 Nanotechnology 13 615
Gregory Boverman et al 2007 Phys. Med. Biol. 52 3619
Francesca Dini et al 2009 Nanotechnology 20 055502
M Rassart et al 2008 New J. Phys. 10 033014
J Twamley and G J Milburn 2006 New J. Phys. 8 328
John Baker et al 2000 Class. Quantum Grav. 17 L149
Charles Santori et al 2009 New J. Phys. 11 123009
Tommaso Castellani and Andrea Cavagna J. Stat. Mech. (2005) P05012
C Cammarota et al J. Stat. Mech. (2009) L12002
Eldad Bettelheim et al 2008 J. Phys. A: Math. Theor. 41 392003