S Gavrilov et al 1999 Nanotechnology 10 213 doi:10.1088/0957-4484/10/2/318
A study of the self-aligned nanometre scale palladium clusters on silicon formation process
S Gavrilov
, S Lemeshko, V Shevyakov and V Roschin
The possibility of the self-aligned formation of Pd/Pd2Si/Si nanostructures on a single-crystal silicon substrate is shown. A porous anodic oxide film of Al was used as a mask which determines the size and shape of the nanostructures. A thin Al film was first deposited on the silicon substrate and then transformed in a nanoporous oxide by the well known anodic treatment procedure in a sulfuric acid and water solution. It is shown by atomic force microscopy that nanoscale Pd clusters with diameters equal to the size of pores in anodic Al remain at the surface of silicon substrate after cathode deposition of Pd into the pores, vacuum thermal annealing and chemical etching of the Al2O3 mask. In addition, we determine the dependencies of the size and shape of the nanoclusters on the mask formation regimes and the Pd deposition conditions.
- PACS
-
61.46.-w Structure of nanoscale materials
68.37.Ps Atomic force microscopy (AFM)
81.65.Cf Surface cleaning, etching, patterning
- Subjects
-
Surfaces, interfaces and thin films
- Dates
-
Issue 2 (June 1999)
Received 27 October 1998
-
A study of the self-aligned nanometre scale palladium clusters on silicon formation process
S Gavrilov et al 1999 Nanotechnology 10 213
-
From the curie to the becquerel
A Allisy 1995 Metrologia 31 467
-
The Sources of Gamma-Ray Bursts and Their Connections with QSOs and Active Galaxies
G. R. Burbidge 2003 ApJ 585 112
-
Supersymmetric Gödel-type universe in four dimensions
Marco M Caldarelli and Dietmar Klemm 2004 Class. Quantum Grav. 21 L17
-
He I 1.083 μm Emission and Absorption in DG Tauri: Line Excitations in the Jet, Hot Wind, and Accretion Flow
M. Takami et al 2002 ApJ 568 L53
-
The X-Ray Spectral Properties of SCUBA Galaxies
D. M. Alexander et al. 2005 ApJ 632 736
-
Characterizing the Cluster Lens Population
Joseph F. Hennawi et al. 2007 ApJ 654 714
-
Three-dimensional real-time in vivo magnetic particle imaging
J Weizenecker et al 2009 Phys. Med. Biol. 54 L1
-
C II* Absorption in Damped Lyα Systems. II. A New Window on the Star Formation History of the Universe
Arthur M. Wolfe et al. 2003 ApJ 593 235
-
Cosmic-Ray Electrons in Groups and Clusters of Galaxies: Primary and Secondary Populations from a Numerical Cosmological Simulation
Francesco Miniati et al. 2001 ApJ 562 233
Users also read
What's this?Related review articles
What's this?- Growth mechanisms for doped clusters
- Computational studies of doped nanostructures
- Dewetting-mediated pattern formation in nanoparticle assemblies