P T Moseley 1997 Meas. Sci. Technol. 8 223 doi:10.1088/0957-0233/8/3/003
P T Moseley
Show affiliationsThe detection and monitoring of gases with solid state sensors has become a well established practice. Three major types of solid state gas sensor are already in widespread use and a number of other designs currently in development may have the potential for commercial exploitation in the future. The established sensor types are reviewed here and a brief description is given of some of the emergent technologies.
07.07.Df Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
85.40.-e Microelectronics: LSI, VLSI, ULSI; integrated circuit fabrication technology
Issue 3 (March 1997)
Received 24 April 1995, accepted for publication 2 October 1996, in final form 20 September 1996
P T Moseley 1997 Meas. Sci. Technol. 8 223
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