Liping Yan et al 2010 Meas. Sci. Technol. 21 015106 doi:10.1088/0957-0233/21/1/015106
Liping Yan1, Benyong Chen1, Dacheng Li2, Chaorong Li3 and Weihua Tang3
Show affiliationsA laser synthetic wavelength interferometer that uses a large synthetic wavelength to subdivide fringes formed by a small single wavelength is described. This study emphasizes the interference signal processing for the interferometer to realize precision measurement. A novel fringe counting method of correcting the integer number of the interference fringe according to the displacement which corresponds to the fraction number is proposed. Through this method, the integer fringe counting error can be eliminated. The realization of the method is designed in detail. The experimental setup was constructed and the displacement experiment was performed in the range of 15 µm with 1 µm increment. The experimental results show that the average error is −2.64 nm and the standard deviation is 0.47 nm. This demonstrates the feasibility of the signal processing method for the laser synthetic wavelength interferometer.
Issue 1 (January 2010)
Received 27 August 2009, in final form 5 October 2009
Published 23 November 2009
Liping Yan et al 2010 Meas. Sci. Technol. 21 015106
V K Chandrasekar et al 2006 J. Phys. A: Math. Gen. 39 L69
A. Doressoundiram et al. 2003 The Astronomical Journal 125 2721
Michael E. Ressler and Mary Barsony 2001 The Astronomical Journal 121 1098
X M H Huang et al 2005 New J. Phys. 7 247
Jens H Gundlach 2005 New J. Phys. 7 205
Fernando G S L Brandão 2005 New J. Phys. 7 254
Massimo Ostilli and Carlo Presilla 2004 New J. Phys. 6 107
Matjaž Perc and Attila Szolnoki 2007 New J. Phys. 9 267
S Axelsson et al 2005 New J. Phys. 7 245