Noise in MEMS

doi:10.1088/0957-0233/21/1/012001

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F Mohd-Yasin et al 2010 Meas. Sci. Technol. 21 012001 doi:10.1088/0957-0233/21/1/012001

Noise in MEMS

FEATURED ARTICLE REVIEW ARTICLE

F Mohd-Yasin¹, D J Nagel² and C E Korman²

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