F Mohd-Yasin et al 2010 Meas. Sci. Technol. 21 012001 doi:10.1088/0957-0233/21/1/012001
Noise in MEMS
FEATURED ARTICLE REVIEW ARTICLEF Mohd-Yasin1, D J Nagel2 and C E Korman2
Show affiliationsTOPICAL REVIEW
This review provides a comprehensive survey of noise research in MEMS. Some background on noise and on MEMS is provided. We review noise production mechanisms, and highlight work on the theory and modeling of noise in MEMS. Then noise measurements in the specific types of MEMS are reviewed. Inertial MEMS (accelerometers and angular rate sensors), pressure and acoustic sensors, optical MEMS, RF MEMS, surface acoustic wave devices, flow sensors, and chemical and biological MEMS, as well as data storage devices and magnetic MEMS, are reviewed. We indicate opportunities for additional experimental and computational research on noise in MEMS.
- PACS
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85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
07.10.Cm Micromechanical devices and systems
07.07.Df Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
- Subjects
- Dates
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Issue 1 (January 2010)
Received 6 August 2007, in final form 6 July 2009
Published 6 November 2009
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Noise in MEMS
F Mohd-Yasin et al 2010 Meas. Sci. Technol. 21 012001
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