E-T Hwu et al 2009 Meas. Sci. Technol. 20 084005 doi:10.1088/0957-0233/20/8/084005
E-T Hwu1,2, H Illers1, L Jusko1 and H-U Danzebrink1
Show affiliationsThe development of a highly sensitive (sub-nanometer) and multi-platform scanning probe microscope (SPM) module is presented. The module is based on an optical DVD pick-up head and uses its astigmatic detection scheme to detect the vertical displacement of the SPM cantilevers. The complete hybrid SPM module is capable of scanning in SPM intermittent contact, SPM contact and optical profilometry modes. The module can be used in a modified optical microscope or be implemented in a stand-alone system. Measurement results prove that the mechanical stability of this SPM module is high enough for atomic resolution imaging. Both scanning-sample and scanning-probe-type SPM setups have been tested based on this SPM module. The noise level and drift rate in the z-direction of the stand-alone system are 10 pm (rms) and 0.2 nm min−1, respectively.
Issue 8 (August 2009)
Received 27 November 2008, in final form 3 April 2009
Published 30 June 2009
E-T Hwu et al 2009 Meas. Sci. Technol. 20 084005
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A Hijazi and V Madhavan 2008 Meas. Sci. Technol. 19 085503
David M. Rust et al. 2008 ApJ 687 635
Adam G. Riess et al. 2009 ApJS 183 109
R. O. Gray et al. 2006 The Astronomical Journal 132 161
Hovhannes R Grigoryan and Anthony W Thomas 2005 J. Phys. G: Nucl. Part. Phys. 31 1527
Bo Zhou and Jun-Jie Zhu 2006 Nanotechnology 17 1763
I Nagy 1986 J. Phys. B: At. Mol. Phys. 19 L421
A V Karpov et al 2003 J. Phys. G: Nucl. Part. Phys. 29 2365