I Bársony et al 2009 Meas. Sci. Technol. 20 124009 doi:10.1088/0957-0233/20/12/124009
I Bársony1, M Ádám1, P Fürjes1, R Lucklum2, M Hirschfelder3, S Kulinyi4 and Cs Dücső1
Show affiliationsThis paper analyses two of the key issues of the development of catalytic combustion-type sensors: the selection and production of active catalytic particles on the micropellistor surface as well as the realization of a reliable thermal conduction between heater element and catalytic surface, for the sensing of temperature increase produced by the combustion. The report also demonstrates that chemical sensor product development by a MEMS process is a continuous struggle for elimination of all uncertainties influencing reliability and sensitivity of the final product.
82.33.Vx Reactions in flames, combustion, and explosions
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
82.80.-d Chemical analysis and related physical methods of analysis
Issue 12 (December 2009)
Received 19 May 2009, in final form 1 September 2009
Published 26 October 2009
I Bársony et al 2009 Meas. Sci. Technol. 20 124009
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