Ryszard S Jachowicz et al 2009 Meas. Sci. Technol. 20 124008 doi:10.1088/0957-0233/20/12/124008
Ryszard S Jachowicz, Jerzy Weremczuk, Daniel Paczesny and Grzegorz Tarapata
Show affiliationsThe paper shows how MEMS (micro-electro-mechanical system) technology and a modified principle of fast temperature control (by heat injection instead of careful control of cooling) can considerably improve the dynamic parameters of dew point hygrometers. Some aspects of MEMS-type integrated sensor construction and technology, whole measurement system design, the control algorithm to run the system as well as empirical dynamic parameters from the tests are discussed too. The hygrometer can easily obtain five to six measurements per second with an uncertainty of less than 0.3 K. The meter range is between −10 °C and 40 °C dew point. In the second part of the paper (section 2), two different successful applications in medicine based on fast humidity measurements have been discussed. Some specific constructions of these super fast dew point hygrometers based on a MEMS sensor as well as limited empirical results from clinical tests have been reported too.
87.80.-y Biophysical techniques (research methods)
07.10.Cm Micromechanical devices and systems
07.07.Df Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
Issue 12 (December 2009)
Received 30 April 2009, in final form 4 September 2009
Published 26 October 2009
Ryszard S Jachowicz et al 2009 Meas. Sci. Technol. 20 124008
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