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Recent advances in lateral field excited and monolithic spiral coil acoustic transduction bulk acoustic wave sensor platforms

Donald F McCann1,2, Lester A French Jr1, Mitchell S Wark1,2 and John F Vetelino1,2

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The quartz crystal microbalance (QCM) has been used extensively as a bulk acoustic wave (BAW) platform for applications such as chemical and biological sensors and rate monitors in thin film deposition systems. Although the QCM is capable of measuring mechanical property changes critical in many thin film deposition systems, it cannot measure electrical property changes that can occur in many sensor applications. In this paper we review the recent developments of two novel transducer configurations for BAW sensors. In the first sensor, called the lateral field excited (LFE) sensor, the transverse shear mode (TSM) in AT-cut quartz is excited by two electrodes on the reference surface, resulting in a bare sensing surface which allows both electrical and mechanical properties of target analytes to be measured. In the second sensor, called the monolithic spiral coil acoustic transduction (MSCAT) sensor, the TSM is excited by a photolithographically deposited spiral antenna on the reference surface which can excite high-order harmonics in the substrate, and potentially lead to increased sensitivity. The responses of both the LFE and MSCAT sensors to electrical and mechanical property changes of liquids have been examined and compared to the response of the standard QCM. In addition, results relating to the detection of chemical and biological target analytes using the LFE and MSCAT sensor platforms are presented.


PACS

07.07.Df Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing

43.60.Vx Acoustic sensing and acquisition

43.38.-p Transduction; acoustical devices for the generation and reproduction of sound

43.60.Qv Signal processing instrumentation, integrated systems, smart transducers, devices and architectures, displays and interfaces for acoustic systems

07.10.Lw Balance systems, tensile machines, etc.

Subjects

Instrumentation and measurement

Dates

Issue 12 (December 2009)

Received 30 April 2009, in final form 23 July 2009

Published 26 October 2009



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