Donald F McCann et al 2009 Meas. Sci. Technol. 20 124001 doi:10.1088/0957-0233/20/12/124001
Donald F McCann1,2, Lester A French Jr1, Mitchell S Wark1,2 and John F Vetelino1,2
Show affiliationsThe quartz crystal microbalance (QCM) has been used extensively as a bulk acoustic wave (BAW) platform for applications such as chemical and biological sensors and rate monitors in thin film deposition systems. Although the QCM is capable of measuring mechanical property changes critical in many thin film deposition systems, it cannot measure electrical property changes that can occur in many sensor applications. In this paper we review the recent developments of two novel transducer configurations for BAW sensors. In the first sensor, called the lateral field excited (LFE) sensor, the transverse shear mode (TSM) in AT-cut quartz is excited by two electrodes on the reference surface, resulting in a bare sensing surface which allows both electrical and mechanical properties of target analytes to be measured. In the second sensor, called the monolithic spiral coil acoustic transduction (MSCAT) sensor, the TSM is excited by a photolithographically deposited spiral antenna on the reference surface which can excite high-order harmonics in the substrate, and potentially lead to increased sensitivity. The responses of both the LFE and MSCAT sensors to electrical and mechanical property changes of liquids have been examined and compared to the response of the standard QCM. In addition, results relating to the detection of chemical and biological target analytes using the LFE and MSCAT sensor platforms are presented.
07.07.Df Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
43.60.Vx Acoustic sensing and acquisition
43.38.-p Transduction; acoustical devices for the generation and reproduction of sound
Issue 12 (December 2009)
Received 30 April 2009, in final form 23 July 2009
Published 26 October 2009
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