L Chassagne et al 2007 Meas. Sci. Technol. 18 3267 doi:10.1088/0957-0233/18/11/001
L Chassagne1, M Wakim1, S Xu1, S Topçu1, P Ruaux1, P Juncar2 and Y Alayli1
Show affiliationsWe propose a 2D displacement control system with sub-nanometric repeatability on position over the millimetre travel range on both axes. It could be useful for nanofabrication processes or other applications related to the nanotechnology community. In our case, the apparatus is planned to be used in atomic force microscopes and lithography systems as a sample-holding device. The method is based on a heterodyne interferometric sensor and a home-made high frequency phase-shifting electronic board. This paper presents the complete mechanical system and gives experimental results showing a repeatability of 0.5 nm over a moving range of 5 mm.
06.60.Sx Positioning and alignment; manipulating, remote handling
Issue 11 (November 2007)
Received 24 April 2007, in final form 2 July 2007
Published 20 September 2007
L Chassagne et al 2007 Meas. Sci. Technol. 18 3267
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