Hao Xing et al 2006 Meas. Sci. Technol. 17 510 doi:10.1088/0957-0233/17/3/S09
Hao Xing, Yang Zhang and Wenhao Huang
Show affiliationsA new type of three-finger micro-tweezers driven by electrostatic force is presented in this paper. The whole system consists of three-finger micro-tweezers and a specially designed high-frequency ac power supply. The three fingers are alternately driven by the power supply with a high-frequency voltage. The direction of the electrostatic forces on the fingers produced by the high-frequency voltage is gyrating between the three fingers quickly, which is equivalent to the invariable forces pointing to the geometrical centre of the micro-tweezers. The tweezers can grasp and manipulate micro objects of size in the range from 30 µm to 100 µm stably.
07.10.Cm Micromechanical devices and systems
84.30.Jc Power electronics; power supply circuits
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
81.20.-n Methods of materials synthesis and materials processing
Instrumentation and measurement
Issue 3 (March 2006)
Received 8 June 2005, in final form 22 November 2005
Published 31 January 2006
Hao Xing et al 2006 Meas. Sci. Technol. 17 510
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