P Glynne-Jones et al 2000 Meas. Sci. Technol. 11 526 doi:10.1088/0957-0233/11/5/312
P Glynne-Jones, S P Beeby, P Dargie, T Papakostas and N M White
Show affiliationsScreen-printed lead zirconate titanate (PZT) layers offer possibilities both for sensing and for actuation applications. The reaction between PZT and silicon during the high temperature sintering phase is a problem when combining PZT layers with silicon microelectromechanical systems. In this study we investigate a range of longer, lower temperature firing profiles for thick-film PZT, to reduce this reaction. Methods of measuring the d 33 piezoelectric coefficient of thick-film PZT layers are reviewed and the test rig used to compare samples is described. Temperatures below 800 °C are found to be insufficient to produce sintering. At other low temperatures, longer firing times are found to be necessary in order to produce consistent results. A temperature of 800 °C for 8 h was found to produce a reduction in the level of reaction, without a serious reduction of the piezoelectric activity.
06.20.Dk Measurement and error theory
77.22.Ch Permittivity (dielectric function)
85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
85.40.Xx Hybrid microelectronics; thick films
07.07.Df Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
Condensed matter: electrical, magnetic and optical
Issue 5 (May 2000)
Received 18 January 2000, accepted for publication 7 March 2000, in final form 7 March 2000
P Glynne-Jones et al 2000 Meas. Sci. Technol. 11 526
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