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Potential sputtering of ionic species from rare gas solids by multiply charged ion impact

K Fukai1, S Fujita1, T Tachibana2,3, T Koizumi1,2 and T Hirayama1,2

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The interaction of low-energy multiply charged Arq + (q ≤ 7) ions with a solid Ne surface is experimentally studied. Desorption of very large cluster ions Nen + (n > 100) is observed. The size distribution of smaller (n = 1–3) cluster ions depends strongly on the charge state of the incident ion, whereas that of larger (n > 7) cluster ions exhibits no dependence on the charge state, indicating that desorption of large cluster ions is due to kinetic sputtering. The potential sputtering yield is estimated by analyzing the size distribution of the desorbed cluster ions. The results suggest that the ion desorption mechanism, which is known as desorption induced by electronic transitions, can also be applied to explain the present results.


PACS

79.20.Rf Atomic, molecular, and ion beam impact and interactions with surfaces

68.49.Sf Ion scattering from surfaces (charge transfer, sputtering, SIMS)

79.20.La Photon- and electron-stimulated desorption

Subjects

Condensed matter: electrical, magnetic and optical

Surfaces, interfaces and thin films

Dates

Issue 8 (3 March 2010)

Received 23 June 2009

Published 4 February 2010



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