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The response of silicon detectors to low-energy ion implantation

T Hopf1, C Yang1, S E Andresen2 and D N Jamieson1

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Studies of electrical transients in single-crystal silicon induced by discrete low-energy (sub-20 keV) ions have been carried out at 90 K, with ionization measurements and damage accumulation in the sample being investigated. Ionization studies reveal a discrepancy between experimental results and predictions from the widely used SRIM (stopping and range of ions in matter) code, one which increases with decreasing energy: a result which has previously been suggested from studies with continuous ion beams. Damage accumulation studies of the sample also demonstrate that current models of damage build-up in silicon are inadequate at such low energies, with experiments indicating that individual ions create a much larger region of decreased charge collection efficiency outside of the small amorphous cores known to be formed by such impacts.


PACS

29.40.Wk Solid-state detectors

61.80.Jh Ion radiation effects

61.72.uf Ge and Si

Subjects

Accelerators, beams and electromagnetism

Nuclear physics

Instrumentation and measurement

Condensed matter: structural, mechanical & thermal

Particle physics and field theory

Dates

Issue 41 (15 October 2008)

Received 7 August 2008, in final form 1 September 2008

Published 12 September 2008



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