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NanoESCA: a novel energy filter for imaging x-ray photoemission spectroscopy

M Escher1, N Weber1, M Merkel1, C Ziethen2, P Bernhard2, G Schönhense2, S Schmidt3, F Forster3, F Reinert3, B Krömker4 and D Funnemann4

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A novel instrument for imaging ESCA is described. It is based on a tandem arrangement of two hemispherical energy analysers used as an imaging energy filter. The main spherical aberration (α2-term) of the analyser is corrected by the antisymmetry of the tandem configuration. The kinetic energy range useable for imaging extends up to 1.6 keV; this is compatible with Mg and Al Kα laboratory x-ray sources. First experiments on the chemical surface composition of a Cu0.98Bi0.02 polycrystal, a GaAs/AlGaAs heterostructure and Ag crystallites on Si(111) have been performed using synchrotron radiation. The results reveal an energy resolution of 190 meV and a lateral resolution (edge resolution) of 120 nm. Besides elimination of the analyser's spherical aberration, the tandem arrangement largely retains the time structure of the electron signal, unlike a single hemispherical analyser.


PACS

82.80.Pv Electron spectroscopy (x-ray photoelectron (XPS), Auger electron spectroscopy (AES), etc.)

79.60.Bm Clean metal, semiconductor, and insulator surfaces

Subjects

Condensed matter: electrical, magnetic and optical

Surfaces, interfaces and thin films

Chemical physics and physical chemistry

Dates

Issue 16 (27 April 2005)

Received 13 May 2004, in final form 9 December 2004

Published 8 April 2005



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