M J Martínez-Pérez et al 2009 Supercond. Sci. Technol. 22 125020 doi:10.1088/0953-2048/22/12/125020
Circuit edit of superconducting microcircuits
M J Martínez-Pérez1,2, J Sesé2,3, R Córdoba2,3, F Luis1,2, D Drung4 and T Schurig4
Show affiliationsHere we present a 'circuit edit' concept for superconducting microcircuits that operate at T≤4.2 K making use of superconducting material fabricated using focused ion beam induced deposition (FIBID) with W(CO)6 as the precursor gas. This material has been recently used to fabricate superconducting nanowires with a critical temperature of 5.2 K. Circuit edit consists of using FIB technology with the possibilities for local patterning with nanometer resolution, to modify or repair highly valuable low- TC superconducting devices such SQUIDs, Josephson junction array voltage standards, or transition edge sensors.
- PACS
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85.25.Dq Superconducting quantum interference devices (SQUIDs)
07.07.Df Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
85.25.Am Superconducting device characterization, design, and modeling
- Subjects
- Dates
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Issue 12 (December 2009)
Received 16 July 2009, in final form 28 September 2009
Published 23 October 2009
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Circuit edit of superconducting microcircuits
M J Martínez-Pérez et al 2009 Supercond. Sci. Technol. 22 125020
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Pål Erik Goa et al 2001 Supercond. Sci. Technol. 14 729
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A Oral et al 1997 Supercond. Sci. Technol. 10 17
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Radiation quantities and units—understanding the sievert
P J Allisy-Roberts 2005 J. Radiol. Prot. 25 97
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