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Circuit edit of superconducting microcircuits

M J Martínez-Pérez1,2, J Sesé2,3, R Córdoba2,3, F Luis1,2, D Drung4 and T Schurig4

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Here we present a 'circuit edit' concept for superconducting microcircuits that operate at T≤4.2 K making use of superconducting material fabricated using focused ion beam induced deposition (FIBID) with W(CO)6 as the precursor gas. This material has been recently used to fabricate superconducting nanowires with a critical temperature of 5.2 K. Circuit edit consists of using FIB technology with the possibilities for local patterning with nanometer resolution, to modify or repair highly valuable low- TC superconducting devices such SQUIDs, Josephson junction array voltage standards, or transition edge sensors.


PACS

85.25.Dq Superconducting quantum interference devices (SQUIDs)

07.07.Df Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing

85.25.Am Superconducting device characterization, design, and modeling

85.25.Cp Josephson devices

Subjects

Superconductivity

Instrumentation and measurement

Dates

Issue 12 (December 2009)

Received 16 July 2009, in final form 28 September 2009

Published 23 October 2009



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