Quick search Find article
Quick search
Find article

Conference on Electron Probe Microanalysis, Reading, September 1963: Recent advances in the instrumentation and technique of electron probe microanalysis

T Mulvey

Show affiliations


CONFERENCE REPORT

The report reviews recent developments described at a Conference of the Electron Microscopy and Analysis Group in the design of linear focusing spectrometers for the electron probe X-ray microanalyser. (A report of the discussions on quantitative analysis will be found in the British Journal of Applied Physics.) In the spectral region for which no suitable crystals are available electronic deconvolution (`unsmearing') circuits are being successfully applied to the analysis of eight elements. New instruments which combine electron microscopy, electron diffraction and electron probe analysis are also discussed.


PACS

07.78.+s Electron, positron, and ion microscopes; electron diffractometers

01.30.Cc Conference proceedings

Subjects

Instrumentation and measurement

Education and communication

Dates

Issue 2 (February 1964)



Related review articles

What's this?
View review articles related to this research to gain an insight into the key trends in this subject area. Related review articles are selected based on PACS/MSC codes, and are no more than three years old.

  1. Model-based SEM for dimensional metrology tasks in semiconductor and mask industry

View by subject




Export








Please login to access our web services, or create an account if you don't yet have one.

You must have cookies enabled in your web browser to be able to login.

Username
Password

Forgotten your password? Get a new one here.