Ameya Bapat et al 2004 Plasma Phys. Control. Fusion 46 B97 doi:10.1088/0741-3335/46/12B/009
Ameya Bapat1, Curtis Anderson1, Christopher R Perrey2, C Barry Carter2, Stephen A Campbell3 and Uwe Kortshagen1,4
Show affiliationsSingle-crystal nanoparticles of silicon, several tens of nanometres in diameter, may be suitable as building blocks for single-nanoparticle electronic devices. Previous studies of nanoparticles produced in low-pressure plasmas have demonstrated the synthesis of nanocrystals 2–10 nm diameter but larger particles were amorphous or polycrystalline. This work reports the use of a constricted, filamentary capacitively coupled low-pressure plasma to produce single-crystal silicon nanoparticles with diameters between 20 and 80 nm. Particles are highly oriented with predominantly cubic shape. The particle size distribution is rather monodisperse. Electron microscopy studies confirm that the nanoparticles are highly oriented diamond-cubic silicon.
Issue 12B (December 2004)
Received 2 July 2004
Published 17 November 2004
Ameya Bapat et al 2004 Plasma Phys. Control. Fusion 46 B97
Upendra Bhandarkar et al 2003 J. Phys. D: Appl. Phys. 36 1399
L Mangolini et al 2004 J. Phys. D: Appl. Phys. 37 1021