D. Lübbert et al 2008 EPL 82 56002 doi:10.1209/0295-5075/82/56002
D. Lübbert1, T. Baumbach1, V. Holý2, P. Mikulík3, L. Helfen1, P. Pernot1, M. Elyyan1, S. Keller4, T. M. Katona4, S. P. DenBaars4 and J. S. Speck4
Show affiliationsA full field X-ray microdiffraction technique is developed providing simultaneously both micrometer-resolved information of crystalline perfection as well as statistical information about the macroscopically illuminated sample. The method allows a detailed characterization of patterned substrates grown by epitaxial lateral overgrowth. Local wing tilts and their fluctuation over the sample area as well as the local and average number of grains in the wings are determined, and the reduction of threading dislocation densities in the grains of the ELO wings can be quantitatively estimated.
61.05.cc Theories of x-ray diffraction and scattering
Issue 5 (June 2008)
Received 29 October 2007, accepted for publication 7 April 2008
Published 26 May 2008
D. Lübbert et al 2008 EPL 82 56002
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