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Microdiffraction imaging of dislocation densities in microstructured samples

D. Lübbert1, T. Baumbach1, V. Holý2, P. Mikulík3, L. Helfen1, P. Pernot1, M. Elyyan1, S. Keller4, T. M. Katona4, S. P. DenBaars4 and J. S. Speck4

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A full field X-ray microdiffraction technique is developed providing simultaneously both micrometer-resolved information of crystalline perfection as well as statistical information about the macroscopically illuminated sample. The method allows a detailed characterization of patterned substrates grown by epitaxial lateral overgrowth. Local wing tilts and their fluctuation over the sample area as well as the local and average number of grains in the wings are determined, and the reduction of threading dislocation densities in the grains of the ELO wings can be quantitatively estimated.


PACS

61.05.cc Theories of x-ray diffraction and scattering

68.55.-a Thin film structure and morphology

61.72.Ff Direct observation of dislocations and other defects (etch pits, decoration, electron microscopy, x-ray topography, etc.)

Subjects

Surfaces, interfaces and thin films

Condensed matter: structural, mechanical & thermal

Dates

Issue 5 (June 2008)

Received 29 October 2007, accepted for publication 7 April 2008

Published 26 May 2008



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