P. S. Krstic et al 2007 EPL 77 33002 doi:10.1209/0295-5075/77/33002
Chemical sputtering by impact of excited molecules
P. S. Krstic1, C. O. Reinhold1 and S. J. Stuart2
Show affiliationsWe study chemical sputtering of deuterated amorphous carbon surfaces by D atoms, vibrationally excited D2, and dissociating D3 molecules, in a range of impact energies, 7.5–30 eV/D. We analyze the role of the internal state, i.e. the vibrationally excited and dissociating states of the neutral molecules resulting from above-surface neutralization of impacting molecular ions in typical sputtering experiments. The sputtering yields are shown to considerably increase with the internal vibrational energy at the lowest impact energies. By comparison of calculated and measured yields we draw conclusions regarding the possible mechanisms for neutralization.
- PACS
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34.35.+a Interactions of atoms and molecules with surfaces
52.40.Hf Plasma-material interactions; boundary layer effects
68.03.Hj Liquid surface structure: measurements and simulations
- Subjects
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Soft matter, liquids and polymers
- Dates
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Issue 3 (February 2007)
Received 17 August 2006, in final form 6 December 2006
Published 1 February 2007
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Chemical sputtering by impact of excited molecules
P. S. Krstic et al 2007 EPL 77 33002
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