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Effect of thermal annealing on the electrical properties of indium tin oxide (ITO) contact on Be-doped GaAs for optoelectronic applications

E Havard1,2, T Camps1,2, V Bardinal1, L Salvagnac1, C Armand3, C Fontaine1 and S Pinaud1

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The effects of thermal annealing on optically transparent electrodes of ITO (indium tin oxide) contact deposited on p-type Be-doped GaAs have been investigated by means of the transfer length method and secondary ion mass spectroscopy measurements. This study shows that the temperature that minimizes the specific contact resistance of ITO/GaAs (500 °C) greatly differs from the temperature that leads to a maximum conductivity of the ITO layer (600 °C) and from the values reported on ITO/GaAs in the literature. The oxygen diffusion in the semiconductor layer and its interaction with the beryllium dopant is pointed out to explain these differences.


PACS

73.40.Cg Contact resistance, contact potential

73.40.Qv Metal-insulator-semiconductor structures (including semiconductor-to-insulator)

68.60.Dv Thermal stability; thermal effects

85.60.-q Optoelectronic devices

73.61.-r Electrical properties of specific thin films

68.35.Fx Diffusion; interface formation

Subjects

Electronics and devices

Semiconductors

Surfaces, interfaces and thin films

Optics, quantum optics and lasers

Dates

Issue 3 (March 2008)

Received 25 October 2007, in final form 4 December 2007

Published 25 January 2008



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