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Investigation of the injection velocity of holes in strained Si pMOSFETs

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G Nicholas1, T J Grasby1, E H C Parker1, T E Whall1, D J Paul2, A G R Evans3 and H von Känel4

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Temple M P, Paul D J, Tang Y T, Waite A M, Cerrina C, Evans A G R, Grasby T J, Parker E H C, von Känel H and O'Neill A G 2005 Enhanced p-MOSFET performance using strained-Si on SiGe virtual substrates grown by low energy plasma enhanced chemical vapour deposition IEEE Trans. Electron Devices submitted

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