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Influence of HF etching on the velocity of surface acoustic phonons in air-aged porous silicon layers

G T Andrews1 and M J Clouter

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Brillouin light scattering spectroscopy has been used to measure surface acoustic phonon velocities on six-month aged layers of porous Si formed from p+-type [111]-oriented crystalline Si substrates. The as-prepared porosities were 25-29% and spectra were recorded both prior to and following a 10 s dip in 5% aqueous HF. The velocities for the dipped samples were 3-6% lower than those of the corresponding pieces which were not dipped. This difference is attributed to the presence of native oxide films on the surfaces of the air-stored samples which are removed by the HF dip.


PACS

78.35.+c Brillouin and Rayleigh scattering; other light scattering

68.47.Fg Semiconductor surfaces

81.65.Cf Surface cleaning, etching, patterning

Subjects

Condensed matter: electrical, magnetic and optical

Semiconductors

Surfaces, interfaces and thin films

Dates

Issue 8 (August 2001)

Received 26 March 2001, in final form 11 May 2001

Published 22 June 2001



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