Optimization of a resonant cavity enhanced MSM photodetector

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Published under licence by IOP Publishing Ltd
, , Citation Dejan M Gvozdic et al 2000 Semicond. Sci. Technol. 15 630 DOI 10.1088/0268-1242/15/6/326

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Author affiliations

1 Faculty of Electrical Engineering, University of Belgrade, Bulevar revolucije 73, 11120 Belgrade, Yugoslavia

2 Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA 02139, USA

Dates

  1. Received 17 December 1999
  2. Accepted 9 March 2000

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0268-1242/15/6/630

Abstract

This paper presents a 2D model and numerical simulation of a submicron resonant cavity enhanced metal-semiconductor-metal photodetector (RCE MSM-PD). Nonstationary effects caused by electron intervalley transfer are taken into account in calculating the RCE MSM-PD response. The analysis of the quantum efficiency and the 3 dB bandwidth shows that there is an optimum channel thickness, for which a maximum bandwidth-quantum efficiency product can be reached.

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10.1088/0268-1242/15/6/326